- Title
- Piezoelectric bimorph actuator with integrated strain sensing electrodes
- Creator
- Mansour, Sepehr Zarif; Seethaler, Rudolf J.; Teo, Yik R.; Yong, Yuen K.; Fleming, Andrew J.
- Relation
- 16th IEEE Conference on SENSORS (SENSORS 2017). Proceedings of the IEEE SENSORS 2017 Conference (Glasgow, Scotland 29 October - 1 November, 2017) p. 253-255
- Publisher Link
- http://dx.doi.org/10.1109/ICSENS.2017.8233951
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
- Date
- 2017
- Description
- This article describes a new method for estimating the tip displacement of piezoelectric benders. Two resistive strain gauges are fabricated within the top and bottom electrodes using an acid etching process. These strain gauges are employed in a half bridge electrical configuration to measure the surface resistance change, and estimate the tip displacement. Experimental validation shows a 1.1 % maximum difference between the strain sensor and a laser triangulation sensor.
- Subject
- displacement; electrodes; strain measurement; surface resistance
- Identifier
- http://hdl.handle.net/1959.13/1384599
- Identifier
- uon:32109
- Identifier
- ISBN:9781509010127
- Language
- eng
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